Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics
M. Guvench, and J. Crosby
University of Southern Maine, Gorham, Maine, USA
In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...
Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis
V. Mathur, K. Anglin, V.S. Prasher, K. Termkoa, S.R. Vangala, X. Qian, J. Sherwood, W.D. Goodhue, B. Haji-Saeed, and J. Khoury
Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA
Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium Phosphide. In the work reported here, we discuss the key design parameters of the device, and present the finite ...
H-Y. Shen, H-P. Tsui, J-C .Hung, S-Y. Lin, and B-H. Yan
Metal Industries Research and Development Centre, Taichung, Taiwan
National Central University, Chungli, Taiwan
In this work, the process of micro-channels in electrochemical micro-milling by using rotating magnet assisted helical tool is presented. The results show helical tool and Lorentz force of the rotating magnetic field that enhance the renewal of the electrolyte and machining efficiency. The feed rate can be raised under the magnetic field assisted in terms of experimental results; moreover, the ...
Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.
C. Tonry, M. K. Patel, C. Bailey, M. P.Y. Desmuliez, W. Yu
Computational Mechanics and Reliability Group (CMRG), School of Computing and Mathematical Sciences, University of Greenwich, London, United Kingdom
Microsystems Engineering Centre (MISCEC, School of Engineering & Physical Sciences, Heriot Watt University, Earl Mountbatten Building, Edinburgh, United Kingdom
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, China
Electric Field Assisted Capillarity (EFAC) is a novel technique for the fabrication of hollow polymer microstructures. It has advantages over current methods as it is a single step process. Hollow microstructures have many uses in industry from microchannels and microcapsules in BioMEMS to fibre-optical waveguides. It makes use of the dielectric properties of polymers combined with a heavily ...
K. Kavitha, Y. R. Manjoosha, C. S. Sukanya, K. Saranya, K. Chandra Devi, M. Alagappan, A. Gupta
Department of Biomedical Engineering, PSG college of technology, Coimbatore, TamilNadu, India
The biological hair-cell is a modular building block of a rich variety of biological sensors. These sensors are responsive to various mechanical properties like vibration, touch, gravitational forces, etc., especially flow. Using micro and nano-fabrication technology, an engineering equivalent of such sensors have been reported to be fabricated, imitating the structure and transfer function of ...
Palo Alto Research Center
In this presentation we present our analysis of the PARC Nanocalorimeter. Calorimetry is basically the measuring of heat of chemical reactions or physical changes. Nanocalorimetry is Calorimetry at the Nanometer scale. The PARC Nanocalorimeter is a special type of Calorimeter, it consists of arrays of Nanocalorimeters. The PARC Nanocalorimeter is intended to be used for screening biochemical ...
A. S. Zurkinden1, F. Campanile1, and L. Martinelli2
1Swiss Federal Institute of Technology (ETH), Zürich, Switzerland
2Università di Bologna, Bologna, Italy
This note addresses the concept of wave energy conversion by means of a piezoelectric material. The ocean surface waves represent an important source of energy. A multiphysics simulation is used to focus on different aspects, namely the free surface wave, the fluid-structure interaction, the mechanical energy input to the piezoelectric material and the electric power output, using an equivalent ...
PAL University of Science and Technology, China
Linear motor has a lot of applications, such as magnetic levitation train, electromagnetic weapons. It is a very important research significance. We established a three-dimensional model of linear motor to calculate the magnetic field lines and flux density distribution, and got the electromagnetic force too. We compared the results of simulation using COMSOL and experiment under different ...
D. Krizaj, I. Iskra, Z. Topcagic, and M. Remskar
University of Ljubljana, Faculty of Electrical Engineering, Ljubljana, Slovenia
Institut Jozef Stefan, Ljubljana, Slovenia
We are developing nanoparticle detector for airborn particles. The detection principle is based on condensation of nanoparticles forming micron sized water droplets and detection of the droplets by a capacitive type nanodetector. We have successfully performed some experimental evaluations of the detection principle and are in the stage of optimization of several parts of the system. As shown ...