S. N. Das, G. Bose
Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India
This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. ...
O. Myers , M. Anjanappa , and C. Freidhoff 
 Mississippi State University, Mississippi State, MS, USA
 University of Maryland Baltimore County, Baltimore, MD, USA
 Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA
This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. The models used in this study were based on a circularly interdigitated design that takes advantage of primarily the d33 electromechanical piezoelectric constant coefficient. Because of the symmetric nature of the devices, 2D axisymmetric models ...
3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour, C. Wartelle, P. Menini
LAAS-CNRS, Toulouse, France
Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.
P. D. Hanasi, B. G. Sheeparamatti, B. B. Kirankumar
Basaveshwar Engineering College, Bagalkot, Karnataka, India
Micro cantilevers are the basic MEMS structures, which can be used both as sensors and actuators. The . The objective of this work is to study concept of pull-in voltage and how to reduce the same. Voltage is applied to upper cantilever beam and lower contact electrode is made as ground. By increasing common area between cantilever beam and contact electrode, and also by reducing thickness of ...
F. Wittbracht, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we show that dipolar magnetic coupling can be used to control the particle flow through microfluidic structures without changing the state of motion of the carrier liquid. Also no external magnetic gradient fields are employed; the total external magnetic force applied is therefore zero. The theoretical idea will be tested experimentally. Here, additional effects originating from ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
D.A. Sanz Becerra, E.A. Unigarro Calpa, J. Osma, F. Segura
Universidad de los Andes, Bogotá, Colombia
A scheme for inductive wireless powering and readout of passive LC sensor is presented. The sensor’s inductor is designed as a planar square coil and is used as the power receiving component. The capacitor is connected directly to the inductor and it was designed as an interdigital capacitor. With a transmitting coil (coupling antenna), an electromagnetic field is generated which couples with ...
Siram Sai Krishna, Nuti Venkata Subrahmanya Ayyappa Sai, Dr.K.Srinivasa Rao
Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
Professor & HOD, Dept. of Electronics and Instrumentation Engineering, Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
The Micro electro mechanical systems (MEMS) technology provides us a platform to interface between mechanical and electrical components. In this paper, we have designed MEMS accelerometer based on piezoelectric property, and simulated using COMSOL Multiphysics®. The design, which has PZT kept in the annular diaphragm, provides good sensitivity. When this accelerometer is subjected to stress ...
S. Heß, R. Külls, and S. Nau
The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting piezoresistive elements. The main requirements for such a sensor are high sensitivity, high resonant frequency and a solid mechanical design. Due to the fact, that pure analytic analyses cannot cover all multi-physical aspects of such a complex device ...
BITS Pilani K K BIRLA GOA CAMPUS
The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes an expansion in the composite beam thereby causing it to deflect. The deflecting beam impinges on the piezoelectric crystal and generating voltage. Response curves for the deflection versus temperature for temperature ranges ...