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Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...

Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor

V. S. Selvakumar[1], L. Sujatha[1]
[1]Rajalakhmi Engineering College, Chennai, Tamil Nadu, India

Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases [5]. To detect the resistive changes, the heater temperature must be in the requisite temperature range over the heater area. Hence the ...

Calculation of Surface Acoustic Waves on a Piezoelectric Substrate using Amazon™ Cloud Computing

U. Vogel [1], M. Spindler [1], S. Wege [1], T. Gemming [1]
[1] Leibniz Institute for Solid State and Materials, Dresden, Germany

In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL Multiphysics® software. By using the MEMS module we demonstrate 3D models with reduced geometry to achieve principle information about the wavefield. For a benchmark, a high-speed workstation with limited memory (RAM) is compared to the most potent ...

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi [1], E. Pauliac-Vaujour [1], J. Eymery [2]
[1] University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
[2] University Grenoble Alpes, CEA, Grenoble, France

We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...

MEMS based Gecko Foot for Micro Robotics

A. Pasumarthy [1], H. Sinha [1], A. Islam [1],
[1] Birla Institute of Technology, Mesra, Ranchi, Jharkhand, India

Gecko foots have inspired researchers to develop designs that can help robots to tread vertically oriented surface. These nanobots find many applications as they can perform a lot of operations more efficiently and also lower the cost of such operations. These can be employed in various fields: medical, industrial etc. Gecko lizards use dry adhesion van der Waals forces to climb walls produced ...

Design and Simulation of MEMS Based Piezoelectric Vibration Energy Harvesting System

M. C. B. Kumar[1], D. B. Prabhu[1], R. Akila[1], A. Gupta[1], M. Alagappan[1]
[1]PSG College of Technology, Coimbatore, Tamil nadu, India

This paper discusses the simulation studies on a vibration based energy harvesting system to convert the undesirable mechanical vibration to useful green power. The design consists of a resonating proof mass and a spring system enclosed in housing and fixed on the source of vibration. A piezoelectric suspension acts as the transducer and generates a voltage that is used to charge the batteries ...

MEMS Based Silicon Load Cell for Weighing Applications

D. Chauhan[1], B. D. Pant[2]
[1]Kurukshetra University, Kurukshetra, Haryana, India
[2]CSIR- Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

Load cells are force sensors, which are used in weighing equipment. The objective of this work is to develop MEMS based load cell. In this work two different load cell designs were simulated. First design is based on compressing a meander like polysilicon strain gage for the measurement of high forces up to 10kN. Second design is based on MEMS pressure sensor consisting of membrane, on which ...

Design of MEMS Based High Sensitivity and Fast Response Capacitive Humidity Sensor

R. Karthick, S. P. K. Babu, A. R. Abirami, and S. Kalainila
Periyar Maniammai University
Periyar Nagar
Vallam, Thanjavur
Tamilnadu, India

This paper presents the design and simulation of high sensitivity and fast response capacitive humidity sensor. Generally, the capacitive humidity sensor is made up of parallel electrode, the upper electrode being a grid with various line width and line spacing. A model is simulated using COMSOL Multiphysics. High sensitivity and fast response of the model is optimized by varying the ...

Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness

Y. Jin [1], S. Kumar [1], R. A. Gerhardt [1],
[1] School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA

1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must perform as insulators, semiconductor or as conducting layers. In recent years, scanning probe methods are being extended to the nanometre scale range since accurate high spatial resolution measurements of electrical properties are of great interest ...

Simulation of a Dual Axis MEMS Seismometer For Building Monitoring System

M. A. Shah [1], F. Iqbal [1], B. L. Lee [1],
[1] Korea University of Technology and Education, Cheonan, Chungcheong, South Korea

A dual axis MEMS seismometer targeted for building monitoring system has been simulated for a full scale of ±5g acceleration. The design uses the capacitive effect for vibration sensing. This comb drive capacitive MEMS seismometer consists of 8 springs with two proof masses. The device is very low cross axis sensitive (almost negligible cross axis error). The cross axis sensitivity of x-axis is ...