Middle East Technical University
In this study, a detailed finite element model coupling the motion dynamics and electromagnetics of a diaphragm based MEMS vibration energy harvester is presented. The energy harvester converts low frequency vibrations to high frequency response by magnetic actuation of a diaphragm carrying coils. AC/DC, Solid Mechanics and Moving Mesh (ALE) modules are coupled together in one 3-D model to ...
B. S. Kavitha, S. B. Rudraswamy, C. R. Venugopal
SJCE, Mysore, Karnataka, India
This paper will describe the dependence of capacitive accelerometer characteristics on the accelerometers physical dimension and its material properties. The sense element of the accelerometer is designed on the basis of a commercially available torsion based accelerometer technology. The sense element consists of an asymmetrically shaped flat plate of metal supported above a substrate surface ...
Arpita Das, Amrita Nandy, Sakuntala Mahapatra, Sk. Mohammed Ali, Minu samantary
National MEMS design centre ,Department of Electronics and Telecommunication, Trident Academy of Technology, Biju Pattnaik University of Technology , India
This paper demonstrates the design of a tunable MEMS capacitor with two plates (one movable and one fixed). The response time obtained is 5μs. The tunable capacitor plays an important role in RF circuits. We focus on a tunable capacitor simulated using COMSOL Multiphysics®. In an electrostatically tunable parallel plate capacitor, you can modify the distance between the two plates when the ...
K. Liang , A. Dodabalapur , D. Sharma ,
 Microelectronics Research Center, University of Texas, Austin, TX, USA
An organic-inorganic dual-channel sensor makes a strong chemical gas sensor because this device design combines the high chemical sensitivities and selectivity of organic semiconductors [1-4] with the superior electrical performance and convenient integration of silicon semiconductors. As shown in the device schematic in Figure 1, the organic channel is the chemically-active material and is ...
D. Krizaj, I. Iskra, Z. Topcagic, and M. Remskar
University of Ljubljana, Faculty of Electrical Engineering, Ljubljana, Slovenia
Institut Jozef Stefan, Ljubljana, Slovenia
We are developing nanoparticle detector for airborn particles. The detection principle is based on condensation of nanoparticles forming micron sized water droplets and detection of the droplets by a capacitive type nanodetector. We have successfully performed some experimental evaluations of the detection principle and are in the stage of optimization of several parts of the system. As ...
S. Iuliia , Y. Sergey , K. Sergey , P. Alexey ,
 Saratov State University, Saratov, Russia
The design of surface acoustic wave (SAW) devices needs the accurate study of the scattering fields, arising from the interaction of SAW with periodic irregularities placed on a surface of crystal to form interdigital transducers or reflective structures (RS). To solve this problem, the finite element methods are very perspective, because they allow to take into account the actual geometry of ...
B.P. Cahill, M. Quade, G. Gastrock, K. Lemke, J. Metze, and D. Beckmann
Institut für Bioprozess und Analysenmesstechnik e.V., Rosenhof, Heilbad Heiligenstadt, Germany
This paper presents a simulation of the operation of a new type of droplet generation probe. This probe, consisting of two concentrically-arranged tubings, is immersed in a beaker of cell medium so that oil is pumped through the outer tubing at a pumping speed less than fluid is drawn into the inner tubing. In this way, droplets of cell medium are entrained into the outlet tubing forming a ...
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...
J. Golebiowski, S. Milcarz
 Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland
The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The influence of shape and dimensions of planar coil on magnetic energy density was described. In cause of magnetic anisotropy of analyzed silicon structure FEM method and couple field method was applied in simulation. The Lorentz force based sensors owing to their potentially simpler ...
Designing the Actuator for the Next-Generation Astronomical Deformable Mirrors: a Multidisciplinary and Multiphysics Approach
C. Del Vecchio, R. Biasi , D. Gallieni, and A. Riccardi
INAF-OAA, Fierenze, Italy
Microgate Srl, Bolzano, Italy
ADS International Srl, Valmadrera, Italy
The actuation system of the deformable mirror is one of the crucial components of an Adaptive Optics unit. One possible implementation comprehends a linear force motor and a capacitive sensor providing the feedback measure signal. Choosing a magnetic circuit that makes optimum use of the magnetic force delivered by a current and properly arranging the electrostatic geometry allows to obtain very ...