S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA
In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and nano- scale since it diminishes the high performance of MEMS devices. For instance, depending on the stiffness ...
J. Hrdlicka, P. Cervenka, M. Pribyl, and D. Snita
Department of Chemical Engineering, Institute of Chemical Technology Prague, Prague, Czech Republic
In this paper we present results of the mathematical modeling of AC electroosmotic micropumps. Unlike others we use the full dynamic description, instead of the linearized model. Skewed hybrid discretization meshes are employed in order to accurately capture the main features of the studied system. Also, we introduce zig-zag electrode arrangements for traveling-wave electroosmotic micropumps. ...
Kinetic Investigation of a Mechanism for Generating Microstructures on Polycrystalline Substrates Using an Electroplating Process
T. Soares, H. Mozaffari, H. Reinecke
Universität Freiburg, Freiburg im Breisgau, BW, Germany
Hochschule Furtwangen, Tuttlingen, BW, Germany
The purpose of this study is to understand the growth mechanism of copper (Cu) films on a Cu-Zn system substrate with a pre-defined pattern. The pattern was defined by conducting a selective etching process on a two-phase polycrystalline substrate. As a result of this process, there were etched regions correspondent to beta-phase crystals and quasi non-etched regions that belong to alpha-phase ...
H. Cabrera, D. A. Zanin, L. G. De Pietro, A. Vindigni, U. Ramsperger, D. Pescia
Laboratory for Solid State Physics, ETH Zürich, Zürich, Switzerland
In our recent experiments we are revisiting the topografiner technology for the imaging of surface topography with a resolution of a few nanometers. In these new technique called Near-Field Emission Scanning Electron Microscopy (NFESEM), low-energy electrons are emitted from a polycrystalline tungsten tip via electric-field assisted tunneling. In order to characterize and improve the ...
K. Kluczyk, W. Jacak
Institute of Physics, Wrocław University of Technology, Wrocław, Poland
Surface plasmon resonance in metallic nanoparticles is highly and shape dependent, which enables varius applications in photovoltaics, photonics, sensing and even medicine. Particularly we observe redshift in plasmon resonance with increasing nanoparticle size. We investigate nanoparticle size influence on plasmon resonance within theoretical and numerical approach and compare results with ...
M. Itomlenskis, P. Fodor, and M. Kaufman
Physics Department, Cleveland State University, Cleveland, OH, USA
Relief patterning of the surface of microchannels has been actively pursued as a method of promoting mixing in systems with a low Reynold’s number (<<100). In this work, we explore, by using the COMSOL Multiphysics package and its Chemical Engineering Module, the possibility of enhancing the mixing quality of two fluids in a microchannel with a non-periodic fractal pattern of ridges ...
Modeling Electric Fields in Slit Capillary Array Fluidic Actuators with Complex Electrode Geometries
J. Frey, A. Droitcour, D. Laser
Wave 80 Biosciences, San Francisco, CA, USA
With their small size, low manufacturing cost, fast transient response, and capacity to generate fluid power directly from small electrical power sources, microdevices incorporating electroosmostic flow (EOF) have wide-ranging applications, including newly developed high-performance bioassay systems suitable for use in resource-limited settings. We report on a class of EOF-based devices called ...
Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.
PAL University of Science and Technology, China
Linear motor has a lot of applications, such as magnetic levitation train, electromagnetic weapons. It is a very important research significance. We established a three-dimensional model of linear motor to calculate the magnetic field lines and flux density distribution, and got the electromagnetic force too. We compared the results of simulation using COMSOL and experiment under different ...