N. Osonwanne, and J.V. Clark
Purdue University, West Lafayette, IN, USA
In this paper we present a method to reduce the comb drive gap in micro electro mechanical systems (MEMS) beyond the minimum fabrication feature size. The benefit of reducing the gap space between comb drive fingers is to increase its sensitivity to changes in capacitance due to displacements. The minimum feature size of standard fabrication foundries is 2 microns. To reduce the gap beyond a ...
S. Heß, R. Külls, and S. Nau
The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting piezoresistive elements. The main requirements for such a sensor are high sensitivity, high resonant frequency and a solid mechanical design. Due to the fact, that pure analytic analyses cannot cover all multi-physical aspects of such a complex device ...
J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and nowadays there are good theoretical methods to accurately predict such eigenfrequencies. When a little mass is ...
R. Prakash, K. M. V. Swamy, and B. G. Sheeparamatti
Basaveshwara Engineering College
MEMS(Microelectromechanical systems) based energy harvesting is process of extracting energy from natural resources in small amounts. Here, number of (millions) small energy harvesting modules lead to substancial energy. In this design, a piezoelectric material is used to scavenge energy from natural resources like radioactive source. COMSOL Multiphysics is used to model and simulate a ...
V. S. Selvakumar, M. S. Gowtham, M. Saravanan, S. Suganthi, and L. Sujatha
Rajalakshmi Engineering College
Micro-tweezers have been widely investigated because of their extensive applications in micro-fluidics technology, microsurgery and tissue-engineering. It has been reported that thermal actuation provides greater forces and easier control when compared to electrostatic micro actuation. In this paper, we discuss about the effects of Alumina as gripper on the operation of micro tweezers. The ...
J. Strong, and C. Washburn
Sandia National Laboratories
The newly emerging field of carbon-based MEMS (C-MEMS) attempts to utilize the diverse properties of carbon to push the performance of MEMS devices beyond what is currently achievable. Our design employs a carbon-carbon composite using nano-materials to build a new class of MEMS accelerometer that is hyper-sensitive over a dynamic range from micro-G to hundreds of G’s – far surpassing the ...
This paper covers the following: * All-Optical Light Modulation of surface plasmon polaritons (SPPs) is achieved using asymmetric single nanoslits. A high on/off switching ratio of >20 dB and phase variation of >? were observed with the device lateral dimension of only about 2 ?m. * Efficient unidirectional excitation of SPP as well as beam splitting are achieved using the dielectric–film ...
Optimized Cantilever-to-Anchor Configurations of Buckled Cantilever Plate Structures for Transducer Applications
A. Arpys Arevalo Carreno, D. Conchouso Gonzalez, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia
The mechanical simulation and analysis of the cantilever-to-anchor configuration for an out-of-plane structure used in transducer applications is reported. The polymer-based Buckled Cantilever Plate “BCP” structure, gives the ability to orient an active device from a horizontal to a vertical position, once assembled. In this paper we compare four different cantilever-to-anchor configurations: ...
A Study of the Effects of Mounting Supports, and Dissipation on a Piezoelectric Quartz Double-Ended Tuning Fork Gyroscope
G. Choi, Y. Yong
Rutgers University, New Brunswick, NJ, USA
A COMSOL model of a piezoelectric quartz double ended tuning fork gyroscope was implemented. The gyroscope has two detection modes; the first mode detects the angular velocity about a z-axis perpendicular to the tuning fork plane (x-y plane), while the second mode detects the angular velocity about a y-axis that is the longitudinal axis along the length of the tuning fork. Eigenfrequency ...
VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics
R. Komaragiri, Sarath. S., N. Kattabomman
NIT Calicut, Kozhikode, Kerala
This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor by considering Very Large Scale Integration (VLSI) layout schemes. The aim of these studies is to find an optimal diaphragm shape by Finite Element Method (FEM) using COMSOL®, which is most suitable for VLSI layout. Optimal diaphragm shape is a diaphragm shape ...