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Designing Piezoelectric Interdigitated Microactuators using COMSOL

O. Myers [1], M. Anjanappa [2], and C. Freidhoff [3]

[1] Mississippi State University, Mississippi State, MS, USA
[2] University of Maryland Baltimore County, Baltimore, MD, USA
[3] Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA

This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. The models used in this study were based on a circularly interdigitated design that takes advantage of primarily the d33 electromechanical piezoelectric constant coefficient. Because of the symmetric nature of the devices, 2D axisymmetric models ...

Design of High Performance Condenser Microphone Using Porous Silicon

S. Suganthi[1], M. Anandraj[2], and L. Sujatha[1]
[1]Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
[2]Department of Physics, Rajalakshmi Engineering College, Chennai, India

Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...

Capacitive Accelerometer Characteristics Study

B. S. Kavitha[1], S. B. Rudraswamy[1], C. R. Venugopal[1]
[1]SJCE, Mysore, Karnataka, India

This paper will describe the dependence of capacitive accelerometer characteristics on the accelerometers physical dimension and its material properties. The sense element of the accelerometer is designed on the basis of a commercially available torsion based accelerometer technology. The sense element consists of an asymmetrically shaped flat plate of metal supported above a substrate surface ...

Design and Analysis of a Wetting Lens for the Pinhole Cameras of a Two Phase Flow System

A. K. Reddy[1], T. Satyanarayana[1]
[1]Lakireddy Balireddy Autonomous College of Engineering, Mylavaram, A.P., India

The present work reports the fabrication process of micro lens for pinhole cameras, modeled using COMSOL Multiphysics®, by satisfying the wetting properties. Wetting is a change in contact angle between the liquid and solid surface area. The wetting properties are clearly understood in terms of forces. The two immiscible fluids were taken for the formation of fluid-fluid and wall-fluid ...

Simulation of Highly Nonlinear Electrokinetics Using a Weak Formulation

G. Soni[1], T. Squires[2], and C. Meinhart[1]

[1]Department of Mechanical Engineering, University of California Santa Barbara, CA, USA
[2] Department of Chemical Engineering, University of California Santa Barbara, CA, USA

We present a numerical model for simulating highly nonlinear electrokinetic phenomena, which occurs at high zeta potentials. In this model, the electric double layer is realized by solving a partial differential equation (PDE) on the double-layer-inducing surface. We also allow for a nonlinear surface capacitance, which relates the surface charge density to the zeta potential of the surface. ...

Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis

V. Mathur[1], K. Anglin[1], V.S. Prasher[1], K. Termkoa[1], S.R. Vangala[1], X. Qian[1], J. Sherwood[1], W.D. Goodhue[1], B. Haji-Saeed[2], and J. Khoury[2]

[1]Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
[2]Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA

Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium Phosphide. In the work reported here, we discuss the key design parameters of the device, and present the finite ...

MEMS Based Tactile Sensors for Robotic Surgery

V. Nivethitha[1], S. P. Rakavi[1], K. C. Devi[1]
[1]PSG College Of Technology, Coimbatore, Tamil Nadu, India

In this work, a piezoelectric tactile sensor will be designed and simulated using COMSOL Multiphysics®. The sensor is designed in order to assess the pressure exerted on the human body while the robotic surgery is performed. The sensor consists of a rigid and compliant cylindrical element. A circular PDMS (Polydimethylsiloxane) film is sandwiched between the rigid cylinder and the base plate to ...

Particle Flow Control by Magnetically Induced Dynamics of Particle Interactions

F. Wittbracht[1], A. Weddemann[1], A. Auge[1], and A. Hütten[1]

[1]Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany

In this work, we show that dipolar magnetic coupling can be used to control the particle flow through microfluidic structures without changing the state of motion of the carrier liquid. Also no external magnetic gradient fields are employed; the total external magnetic force applied is therefore zero. The theoretical idea will be tested experimentally. Here, additional effects originating from ...

Design and Characterization of a MEMS Varactor

V. S. Nagaraja, N. Suma, and S. L. Pinjare
Nitte Meenakshi Institute of Technology

The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can also be built using electro – thermal actuating mechanism. Compared to electro static, tunable capacitors actuated by thermal actuators have several advantages like lower driving voltages. The performance of thermal actuator becomes a key factor ...

Single Crystal Diamond NEMS Switch

M. Liao
Optical and Electronic Materials Unit
National Institute for Materials Science

A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.