O. Myers , M. Anjanappa , and C. Freidhoff 
 Mississippi State University, Mississippi State, MS, USA
 University of Maryland Baltimore County, Baltimore, MD, USA
 Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA
This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. The models used in this study were based on a circularly interdigitated design that takes advantage of primarily the d33 electromechanical piezoelectric constant coefficient. Because of the symmetric nature of the devices, 2D axisymmetric models ...
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
B. S. Kavitha, S. B. Rudraswamy, C. R. Venugopal
SJCE, Mysore, Karnataka, India
This paper will describe the dependence of capacitive accelerometer characteristics on the accelerometers physical dimension and its material properties. The sense element of the accelerometer is designed on the basis of a commercially available torsion based accelerometer technology. The sense element consists of an asymmetrically shaped flat plate of metal supported above a substrate surface ...
A. K. Reddy, T. Satyanarayana
Lakireddy Balireddy Autonomous College of Engineering, Mylavaram, A.P., India
The present work reports the fabrication process of micro lens for pinhole cameras, modeled using COMSOL Multiphysics®, by satisfying the wetting properties. Wetting is a change in contact angle between the liquid and solid surface area. The wetting properties are clearly understood in terms of forces. The two immiscible fluids were taken for the formation of fluid-fluid and wall-fluid ...
G. Soni, T. Squires, and C. Meinhart
Department of Mechanical Engineering, University of California Santa Barbara, CA, USA
 Department of Chemical Engineering, University of California Santa Barbara, CA, USA
We present a numerical model for simulating highly nonlinear electrokinetic phenomena, which occurs at high zeta potentials. In this model, the electric double layer is realized by solving a partial differential equation (PDE) on the double-layer-inducing surface. We also allow for a nonlinear surface capacitance, which relates the surface charge density to the zeta potential of the surface. ...
Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis
V. Mathur, K. Anglin, V.S. Prasher, K. Termkoa, S.R. Vangala, X. Qian, J. Sherwood, W.D. Goodhue, B. Haji-Saeed, and J. Khoury
Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA
Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium Phosphide. In the work reported here, we discuss the key design parameters of the device, and present the finite ...
V. Nivethitha, S. P. Rakavi, K. C. Devi
PSG College Of Technology, Coimbatore, Tamil Nadu, India
In this work, a piezoelectric tactile sensor will be designed and simulated using COMSOL Multiphysics®. The sensor is designed in order to assess the pressure exerted on the human body while the robotic surgery is performed. The sensor consists of a rigid and compliant cylindrical element. A circular PDMS (Polydimethylsiloxane) film is sandwiched between the rigid cylinder and the base plate to ...
F. Wittbracht, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we show that dipolar magnetic coupling can be used to control the particle flow through microfluidic structures without changing the state of motion of the carrier liquid. Also no external magnetic gradient fields are employed; the total external magnetic force applied is therefore zero. The theoretical idea will be tested experimentally. Here, additional effects originating from ...
V. S. Nagaraja, N. Suma, and S. L. Pinjare
Nitte Meenakshi Institute of Technology
The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can also be built using electro – thermal actuating mechanism. Compared to electro static, tunable capacitors actuated by thermal actuators have several advantages like lower driving voltages. The performance of thermal actuator becomes a key factor ...
Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.