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Modeling and Analysis of Thermal Bimorph using COMSOL Multiphysics®

Rachita Shettar[1], Dr. B G. Sheparamatti[1]
[1]Basaveshwar Engineering College, Bagalkot, Karanataka, India

In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...

Surface Acoustic Wave Based MEMS Resonator

S. Dixit[1], R. C. Jain[1]
[1]Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India

Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface. A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz. Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The ...

Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor

V. S. Selvakumar[1], L. Sujatha[1]
[1]Rajalakhmi Engineering College, Chennai, Tamil Nadu, India

Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases [5]. To detect the resistive changes, the heater temperature must be in the requisite temperature range over the heater area. Hence the ...

Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...

Design and Multiphysics Analysis of MEMS Capacitive Microphone

N. J. Krishnapriya[1], M. R. Baiju[1]
[1]College of Engineering, Trivandrum, Kerala, India

In this paper, design and analysis of a novel MEMS capacitive microphone which uses corrugations and perforations in diaphragm is presented. The corrugation and perforation in diaphragm reduces the residual stress and increases the mechanical sensitivity of diaphragm. Instead of the perforated back plate, holes have been made on the diaphragm. Therefore, potassium hydroxide (KOH) etching can be ...

Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology

V. S. P. Rajesh [1],
[1] St. Mary's Group of Institutions, Hyderabad, India

3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are analyzed at resonance & anti-resonance frequencies. Operating frequency is from 8.7 MHz which acts as start band and 9.2 MHz as stop band. FIDT model helps in energy optimization by focusing the propagating wave more on to the poly-chemical coating. ...

Simulation of MEMS based Flexible Flow Sensor for Biomedical Application

D. Maji[1], C. P. Ravikumar[2], and S. Das[1]
[1]School of Medical Science and Technology, Indian Institute of Technology, Kharagpur, West Bengal, India
[2]Texas Instruments (India) Pvt. Ltd., Bangalore, India

Arterial disease, especially Coronary Artery Disease (CAD) is one of the leading causes of premature morbidity and mortality. During the flow, blood interacts with vessel wall mechanically and chemically which modulates the plaque formation in blood vessel leading to coronary artery diseases. Here we propose to simulate a MEMS based flexible flow sensor based on anemometer principle designed to ...

Design and Simulation of MEMS Based Piezoelectric Vibration Energy Harvesting System

M. C. B. Kumar[1], D. B. Prabhu[1], R. Akila[1], A. Gupta[1], M. Alagappan[1]
[1]PSG College of Technology, Coimbatore, Tamil nadu, India

This paper discusses the simulation studies on a vibration based energy harvesting system to convert the undesirable mechanical vibration to useful green power. The design consists of a resonating proof mass and a spring system enclosed in housing and fixed on the source of vibration. A piezoelectric suspension acts as the transducer and generates a voltage that is used to charge the batteries ...

Fluid-structure Interaction Modeling of Air Bearing

H.R. Javani[1], P. Kagan[2], F. Huizinga[1]
[1]ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
[2]ASML - MDev – System Dynamics, Veldhoven, The Netherlands

Air bearings are special type of bearings which provide nearly zero friction between two surfaces. This is achieved by a compressed layer of gas between the surfaces. This study presents a modeling technique for an Air bearing component. COMSOL Multiphysics® is used to efficiently solve a coupled Fluid-Structure Interaction analysis. Computational time is significantly reduced compared to ...

MEMS Based Sensor for Blood Group Investigation

M. Kaushik [1], S. Katti [1], V. Saradesai [1], P. Naragund [1], P. Vidhyashree [1], A. K. V. Nandi [1]
[1] B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India

This article describes the design of MEMS based cantilever structure intended for determination of blood group and it is compared with manual method. Cantilever structure design has a sensing layer and when a blood sample comes in contact with this, results in coagulation. The surface tension in turn occurs due to chemical and biological reactions of antigen and antibodies resulting in ...