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MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the evolution of the digital era. The loudspeaker design has not been changed for almost a century [1-5]. The acoustic transducer is the last analogue component needed for a true digital audio system. We want to validate the feasibility of using an ...

Design & Simulation of Various Shapes of Cantilever Beam for Piezoelectric Power Generator

P. Graak [1], S. Kaur [1], A. Gupta [1], P. Chhabra [1], D. Kumar [1], A. Shetty [2]
[1] Kurukshetra University, Kurukshetra, Haryana, India
[2] Indian Institute of Science, Bengaluru, Karnataka, India

The ambient vibrations can be of great promise for harvesting energy initially at small scale to use for micro and nano scale devices. Such vibrations converted to electrical energy by piezoelectric transducer due to their major significance. Various research journals have introduced the phenomenon of energy optimization to increase the generated power and used directly for application like ...

Modeling and Analysis of Thermal Bimorph using COMSOL Multiphysics®

Rachita Shettar[1], Dr. B G. Sheparamatti[1]
[1]Basaveshwar Engineering College, Bagalkot, Karanataka, India

In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...

Optimizing the Performance of MEMS Electrostatic Comb-Drive Actuator with different Flexure Springs

S. Gupta[1], T. Pahwa[1], R. Bansal[1], V. Bansal[1], B. Prasad[1], D. Kumar[1]
[1]Electronic Science Department Kurukshetra University, Kurukshetra, Haryana

A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. Stress distribution over different spring designs are simulated by COMSOL 3.5a using a standard comb drive with 4 movable ...

Extraction of Electrical Equivalent Circuit of One Port SAW Resonator Using FEM-based Simulation

A. K. Namdeo [1], H. B. Nemade [1],
[1] Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati, Assam, India

The paper presents a method of extraction of electrical equivalent circuit of a one port surface acoustic wave (SAW) resonator from the results of simulation based on finite element method (FEM) using COMSOL Multiphysics software. A one port SAW resonator consists of large number of periodic interdigital transducer (IDT) electrodes fabricated on the surface of a piezoelectric substrate. A ...

MEMS Resonator for RF Applications

V. Harshey
Visvesvaraya National Institute of Technology
Nagpur
Maharashtra, India

Vibrating mechanical tank components, such as quartz crystals and surface acoustic wave (SAW) resonators with Q’s in the range of 10e3–10e6, are widely used to implement high-Q oscillators and band pass filters in the radio frequency (RF) and intermediate frequency (IF) stages of communication transceivers. This paper will discuss designing of resonator and effects of various parameter on the ...

Optimization of MEMS Based Capacitive Accelerometer for Fully Implantable Hearing Aid Application

A. Dwivedi [1], G. Khanna [1],
[1] NIT Hamirpur, Hamirpur, Himachal Pradesh, India

This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. The analysis is done using COMSOL Multiphysics®. The maximum applied acceleration was considered 1g. Human temporal bones ...

CMUT Based Free Membrane Intra-Cardiac Volumetric Blood Flow-Meter

P. Priya [1], B. D. Pant [2],
[1] Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
[2] CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

In this paper, a free membrane is used as a receiver to increase the capacitance and therefore the resolution of the flow meter. For the current application, from the wavelength of sound wave in soft tissue (c= 1540 m/s) the resolution was calculated to be 0.48 mm. This gives the first Eigen frequency of the capacitive structure according to which the poly silicon membrane was designed. After ...

Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...

MEMS Based Sensor for Blood Group Investigation

M. Kaushik [1], S. Katti [1], V. Saradesai [1], P. Naragund [1], P. Vidhyashree [1], A. K. V. Nandi [1]
[1] B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India

This article describes the design of MEMS based cantilever structure intended for determination of blood group and it is compared with manual method. Cantilever structure design has a sensing layer and when a blood sample comes in contact with this, results in coagulation. The surface tension in turn occurs due to chemical and biological reactions of antigen and antibodies resulting in ...