R. Karthick, S. P. K. Babu, A. R. Abirami, and S. Kalainila
Periyar Maniammai University
This paper presents the design and simulation of high sensitivity and fast response capacitive humidity sensor. Generally, the capacitive humidity sensor is made up of parallel electrode, the upper electrode being a grid with various line width and line spacing. A model is simulated using COMSOL Multiphysics. High sensitivity and fast response of the model is optimized by varying the ...
Rachita Shettar, Dr. B G. Sheparamatti
Basaveshwar Engineering College, Bagalkot, Karanataka, India
In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...
P. Nakielski, T. Kowalczyk, T.A. Kowalewski
Institute of Fundamental Technological Research Polish Academy of Sciences, Warsaw, Poland
Comprehensive studies of drug transport in nanofibres based mats have been performed to predict drug release kinetics. The paper presents our approach to analyze the impact of fibers arrangement, one of the parameters varied in our parallel experimental studies. COMSOL Multiphysics® has been used to assess the impact of the various purposed arrangements of fibers within the mat. Drug release ...
R. Krishnan, H.B. Nemade, and R. Paily
Indian Institute of Technology, Guwahati
In this paper, we discuss simulation of one-port Surface Acoustic Wave (SAW) resonators using COMSOL Multiphysics. Resonator action can be achieved in one of the two ways; a single Inter-digital Transducer (IDT) having several fingers over a piezoelectric substrate or a short IDT with reflecting gratings at the ends of the IDT. We have modeled a Rayleigh wave type SAW device choosing YZ ...
Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications
A. Arevalo, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia
The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...
Charles Stark Draper Laboratory
Micromechanical resonators are used in a wide variety of applications, including inertial sensing, chemical and biological sensing, acoustic sensing, and microwave transceivers. Despite the distinct design requirements for each of these applications, a ubiquitous resonator performance parameter emerges. This is the resonator’s Quality factor (Q), which describes the mechanical energy damping. ...
N. Gouthami, D. Parthiban, M. Alagappan, and G. Anju
PSG College of Technology
Tamil Nadu, India
The objective of this paper is to design a 3D Gas Sensor for sensing Hydrogen gas and to increase the conductivity at nano level. In this novel design, nanorods act as the sensing layer. The sensitivity towards gas adsorption is found to be increased due to its high surface to volume ratio. The total displacement and voltage on intermediate layer after gas adsorption will be changing by varying ...
L. Nayana, P. Manohar, S. Babu
Department of Electrical Engineering, Visvesvaraya Technological University, Bangalore, Karnataka, India
In this paper some discrete parts of a valveless piezoelectric micropump for drug delivery system is designed and simulated. The core components of the micropump are actuator unit that converts the reciprocating movement of a diaphragm actuated by a piezoelectric actuator into a pumping effect and Nozzle/diffuser elements that are used to direct the flow from inlet to outlet. Simulations are ...
A. Ravi, R. Krishna, J. Christen
Arizona State University, Tempe, AZ, USA
Capacitive MEMS sensors offer high spatial resolution, sensitivity and good frequency response. In this paper, we present a circular membrane capacitive MEMS device that finds use both as capacitive micromachined ultrasonic transducer (CMUT) and pressure sensor. The MEMS device is first designed and simulated to work as a CMUT operating at about 5 MHz frequency. The device can also function as a ...
A. Arevalo, I. G. Foulds
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
The University of British Columbia, Vancouver, BC, Canada
A COMSOL Multiphysics® simulation was used to simulate the behavior of a micro-membrane (Acoustic Pixel) to be used as a potential acoustic transducer. The MEMS and Piezoelectric devices interfaces were used to simulate such transducer. A four-cantilever spring configuration is initially proposed. Each cantilever has a width of 30 µm and are connected to a central circular plate with a radius ...