A Galeria de Aplicações possui tutorias sobre o COMSOL Multiphysics® e aplicativos de demonstração pertinentes às áreas de elétrica, mecânica estrutural, acústica, escoamento e química. Você pode usar esses exemplos como um ponto de partida para o seu próprio trabalho de simulação baixando o modelo do tutorial ou o aplicativo e suas instruções. Use a função "Busca Rápida" para encontrar modelos da sua área de interesse. Para baixar os arquivos MPH, faça o login, ou se cadastre, no COMSOL Access usando uma licença válida do COMSOL, para poder baixar os arquivos MPH. Note que muitos dos exemplos disponibilizados aqui também podem ser acessados através da Application Libraries que faz parte do software COMSOL Multiphysics® e está disponível a partir do menu File.


Plasma Modulex

Chlorine Discharge Global Model

Plasma discharges containing chlorine are commonly used to etch semiconductors and metals in microelectronics fabrication. This tutorial model studies chlorine plasma discharges using a global (volume-averaged) diffusion model. Global diffusion models can run simulations in a fraction ... Saiba Mais

Computing the Plasma Impedance

This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The _Time Periodic_ study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver ... Saiba Mais

Oxygen Boltzmann Analysis

The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model ... Saiba Mais

Benchmark Model of a Capacitively Coupled Plasma

The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes. Saiba Mais

Argon Boltzmann Analysis

The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. Analytic forms of the EEDF exist such as Maxwellian or Druyvesteyn, but in some cases they fail to fit the discharge physics. This tutorial model investigates the effects ... Saiba Mais

Electrodeless Lamp

This model simulates an electrodeless lamp with argon/mercury chemistry. The low excitation threshold for mercury atoms means that even though the mercury is present in small concentrations, its behavior dominates. There is strong UV emission from the plasma at 185 nm and 253 nm. The UV ... Saiba Mais

Global Model Coupled with the Two-Term Boltzmann Equation

The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. In this example, the formation period of an Argon plasma is studied with special attention paid to the EEDF. The plasma is created within a 4 cm gap by a DC source voltage of 1 ... Saiba Mais

Harmonic Content of the Power Deposition into a Dual Frequency Capacitively Coupled Plasma

Energy transfer from the time varying electrostatic field to electrons in a capacitively coupled plasmas (CCP) does not exclusively occur at twice the RF frequency. Due to the highly nonlinear mechanism of power transfer from the fields to the electrons, power deposition occurs at ... Saiba Mais

Pulsed CCP Discharge

This tutorial model shows how to set up a model of a pulsed capacitive discharge. The on pulse consists of 10 periods of excitation at 13.56MHz, followed by no excitation for 100 periods. The I-V characteristics, the electron density, temperature and plasma potential are studied. Saiba Mais

Alpha to Gamma Transition

Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the ... Saiba Mais