Galeria de Modelos

A Galeria de Modelos possui arquivos do COMSOL Multiphysics de várias áreas de aplicação incluindo elétrica, mecânica, escoamento e química. Você pode baixar modelos prontos e também tutoriais passo-a-passo para montar seu modelo, e usá-lo como ponto de partida para o seu próprio modelo. Use a função de busca "Quick Search" para encontrar modelos na sua área de interesse e faça o login ou o seu cadastro no COMSOL Access, cadastrando a sua licença do COMSOL, para poder baixar os arquivos.

3D Model of an ICP Reactor with Argon Chemistry

3D plasma modeling is possible to do in COMSOL. A square coil is placed on top of a dielectric window and is electrically excited at 13.56MHz. A plasma is formed in the chamber beneath the dielectric window, which contains Argon gas at low pressure (20 mtorr). The gas flows into the process chamber from two 2 inch ports and the gas is extracted through a single 4 inch port. The plasma is ...

Electronegative inductively coupled plasma

Electronegative plasmas exhibit different characteristics than electropositive discharges due to the presence of negative ions. This model simulates an inductively coupled plasma for a mixture of Argon (30%) and Oxygen (70%). The plasma chemistry consists of 62 reactions and 15 species. The negative ions are held in the core of the plasma because they cannot escape the ambipolar field.

Thermal Plasma

This model simulates a plasma at medium pressure (2 torr) where the plasma is still not in local thermodynamic equilibrium. At low pressures the two temperatures are decoupled but as the pressure increases the temperatures tend towards the same limit.

Harmonic Content of the Power Deposition into a Dual Frequency Capacitively Coupled Plasma

Energy transfer from the time varying electrostatic field to electrons in a capacitively coupled plasmas (CCP) does not exclusively occur at twice the RF frequency. Due to the highly nonlinear mechanism of power transfer from the fields to the electrons, power deposition occurs at frequencies higher than twice the driving frequency. For dual frequency CCP reactors the harmonic content of the ...

Benchmark Model of a Capacitively Coupled Plasma

The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes.

Oxygen Boltzmann Analysis

The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model solves a two-term approximation to the Boltzmann equation and compares the computed drift velocity and ...

GEC CCP Reactor, Argon Chemistry, 1D

The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).

Argon Boltzmann Analysis

The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. Analytic forms of the EEDF exist such as Maxwellian or Druyvesteyn, but in some cases they fail to fit the discharge physics. This tutorial model investigates the effects of various parameters on the electron energy distribution function and rate coefficients for an argon discharge. ...

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