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Benchmark Model of a Capacitively Coupled Plasma

Application ID: 11745

The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes.

This model is included as an example in the following products:

Plasma Module

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Descrição dos Produtos and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.