MEMS for MEMS
Phil Kinnane February 16, 2012
One of the things I do at COMSOL is to make some of the images we use in our marketing material. I was working on a picture of a piezoelectric microtweezer for an ad that would be used for our MEMS Module, as the one you can see below. That’s when I started wondering what these microtweezers actually do.
Searching the web, I saw what a group at Purdue was doing with them. These tweezers are, in essence, MEMS for MEMS.
While I’ve always been aware that microtweezers were great for capturing blood cells and the like, I never really thought they could be used to assemble the small moving parts in things like MEMS accelerometers and gyroscopes. And this is being done commercially. An associate professor at Purdue explains it well when he uses an analogy of microtweezers moving micro Lego blocks into place. If you’re interested in MEMS, here is the article that I came across.