S. Meenatchisundaram, S. M. Kulkarni, S. Bhat
Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.
Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a challenge in design with respect to appropriate positioning, shape and temperature compensation. Different models of piezoresistive pressure sensors are proposed to enhance its sensitivity in terms of output voltage. This paper aims in sensitivity ...
G. R. Prakash, K. M. V. Swamy, S. Huddar, B. G. Sheeparamatti, Kirankumar B. B.
Basaveshwar Engineering College, Bagalkot, Karnataka, India
The focus of this paper is to study the effect on resonance frequency and power enhancement techniques of piezoelectric MEMS and modeling, design, and optimization of a piezoelectric generator based on a two-layer bending element(Figure 1) using COMSOL Multiphysics. An analytical relation was developed based on the shift in resonance frequency(Figure 2) caused by the addition of a thin film ...
T. Kaya, B. Shiari, K. Petsch, and D. Yates
Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI
In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...
S. Gorelick, M. Leivo, U. Kantojärvi
VTT Technical Research Centre of Finland, Espoo, Finland
Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities or angular comb-drive scanning mirrors, typically require simulations to reliably evaluate the air damping. The simulated and experimental performance of the following systems was evaluated and compared: two types of out-of-plane cantilevers, ...
T. Andersen, M. A. E. Andersen, O. C. Thomsen
DTU Elektro, Technical University of Denmark, Kgs. Lyngby, Denmark
In this work COMSOL is utilized to obtain the Mason lumped parameter model for a piezoelectric transformer (PT) design. The Mason lumped parameters are relevant in the design process of power converters. The magnitude of the impedance is simulated for a specific interleaved multilayer thickness mode PT. The PT design has been prototyped and the measurements results are compared with simulations. ...
S. Nisitha, T. Satyanarayana, S. Sreeja
Department of EIE, Lakireddy Bali Reddy Engineering College, Mylavaram, Andhra Pradesh, India.
NPMASS Centre, Department of EIE, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra
There has been growing demand for high performance micro sensors capable of detecting nuclear radiations being released from various industries, Nuclear reactors. Radiations emitted from the radioactive materials are invisible and not directly detectable by human senses. Thus it is highly essential to work on design of bolometers with absorptive elements providing optimum sensitivity. The ...
V. Ranjan, A. Kumar, G. Prakash, R. Mandal
Department of Mechanical Engineering, Indian School of Mines, Dhanbad, Jharkhand, India
Understanding the flow fields at the micro-scale is a key to develop methods of successfully mixing fluids for micro-scale applications. This paper investigates flow characteristics and mixing of three different geometries in micro-channel. A Circular groove micro mixer has been designed and simulated. One such channel is shown in Figure1. The geometry of the channels taken was rectangular with a ...
L. Sujatha, B. Preethi
Rajalakshmi Engineering College, Chennai, India
MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG)  with a perforated proof mass. The perforated proof mass used in the design enables the reduction of the damping effect. This MEMS based gyroscope was designed using COMSOL Multiphysics 4.2a. This ...
H. S. Shriram, T. Nimje, D. Vakharia
BITS Pilani, Rajasthan, India
Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS capacitor is a micrometre-scale electronic device whose capacitance is controlled through different actuation mechanisms which govern the moving parts. It can have electrostatic or electrothermal actuators depending on the functional complexity and ...
H.R. Javani, P. Kagan, F. Huizinga
ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
ASML - MDev – System Dynamics, Veldhoven, The Netherlands
Air bearings are special type of bearings which provide nearly zero friction between two surfaces. This is achieved by a compressed layer of gas between the surfaces. This study presents a modeling technique for an Air bearing component. COMSOL Multiphysics® is used to efficiently solve a coupled Fluid-Structure Interaction analysis. Computational time is significantly reduced compared to ...